This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.This International Standard is not intended to...
By ISO TC 201/SC 4/WG 2
Paperback: 24 pages
Publisher: Multiple. Distributed through American National Standards Institute (ANSI) (August 23, 2007)
Language: English
ASIN: B000XYTJJQ
Product Dimensions: 8.2 x 0.1 x 10.5 inches
Format: PDF Text djvu ebook
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